Semiconductor Equipment

Descriptions

• Category : ETCH
• Model : Lam 4520
• Manufacture : Lam Research
• Platform Type : CENTURA II frame
• Wafer Size : 200mm
• Wafer Type : SNNF
• Vender : Lam Research Corporation
• Process: RAINBOW
• Model No. : Rainbow4520
• Wafer/Mask : 8"
• Serial No. : 3746

Configrations

• Wafer Transfer
  • Cassette to Cassette ( Hine 38A Indexer)
  • Unloder mapping system(made in samsung)
  • Pick and place single wafer transport with non contact wafer alignment and flat zone orientation
• Chamber
  • Single Chamber with Variable Gap Electrode
  • 2.0KW and 380kHz RF Power Supply (RF Generator Model : pdw-2200)
  • Automatic Match system
  • Electrode Temperature Unit Interface
  • Photodiode Optical endpoint Detector
  • ESC Chuck
  • Viton O-Ring
  • N2 Ballast Kit
  • Orbital Gas Box
• System Controller : Envision software
• Pressure Control : Automatic Pressure Control(AC-2):Throttle and Isolation Valve
• Temperature Control System
• Process Gas Configuration : Standard Clean Gas Box with 5 MFC's for Reaction