Semiconductor Equipment
- Company Name:E-Tech Solution Co., Ltd.
- Membership:Free Member
- Member Since:2007. 10.31
- Country/Region:Korea
- City:Gyeonggi-do
- Contact:Jeonghyeon Lee
- Related Keywords:semiconductor equipment
E-Tech Solution Co., Ltd.
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Contact us
E-Tech Solution Co., Ltd.
[Korea]
- Address
- #250, Yangbok-ri, Bogae-myeon Anseong-si Gyeonggi-do
- Phone
- 82-31-6774975
- Contact name
- Jeonghyeon Lee
Quick Information
- Model Number : Centura II E-Max
Description
Descriptions
- Category : ETCH
- Model : Centura II E-Max
- Manufacture : AMAT
- Vintage : 2004
- Platform Type : CENTURA II frame
- Wafer Size : 200mm
- Wafer Type : SNNF
- Robot : VHP+
- Chamber Type
- Ch# A&B&C&D : E-Max Chamber
- Hot Pack Type EPD
- Alcatel ATH 1600M Trubo Pump
- Ceramic ESC
- ENI OEM 28B Generator
- Dual Buterfly Gate V/V
- Standard Liner
- Ch# F : Orienter
- Ch# A&B&C&D : E-Max Chamber
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